Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures - Concepedia

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Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

192

Citations

18

References

1996

Year

E.H. Klaassen, K. Petersen, J.M. Noworolski, J. Logan, N.I. Maluf, Joe Brown, C.W. Storment, Wendell McCulley, G.T.A. Kovacs

Sensors and Actuators A Physical

Materials ScienceMaterials EngineeringIon ImplantationWafer Scale ProcessingNew TechnologyEngineeringMicrofabricationSilicon Fusion BondingSurface ScienceApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsPlasma Etching

References

	Year	Citations

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