Concepedia

K. Petersen

KP

Statistics

Publications

70

Citations

7.7K

H-Index

34

Active since

1969

Affiliations

Technical University of Denmark(Current)

IBM (United States)

Massachusetts Institute of Technology

University of California, Berkeley

Stanford University

K. Petersen is an author at Technical University of Denmark specializing in engineering, materials science, and semiconductor devices.

Publications per year

1969–2016

70

Publications

70

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Bulk micromachining of silicon

G.T.A. Kovacs, N.I. Maluf, K. Petersen · Proceedings of the IEEE · 1998 · 721 citations

Engineering, Materials Engineering, Materials Science +17

Dynamic micromechanics on silicon: Techniques and devices

K. Petersen · IEEE Transactions on Electron Devices · 1978 · 391 citations

Engineering, Materials Engineering, Materials Science +16

Micromechanical Membrane Switches on Silicon

K. Petersen · IBM Journal of Research and Development · 1979 · 313 citations

Engineering, Electrical Engineering, Materials Engineering +13

Young’s modulus measurements of thin films using micromechanics

K. Petersen, C. R. Guarnieri · Journal of Applied Physics · 1979 · 296 citations

Natural Sciences, Materials Engineering, Materials Science +11

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