Concepedia

N.I. Maluf

NM

Statistics

Publications

26

Citations

3K

H-Index

18

Active since

1989

Affiliations

Stanford University(Current)

Stanford SystemX Alliance

University of California, Berkeley

N.I. Maluf is an author at Stanford University specializing in engineering, microfabrication, and materials science.

Publications per year

1989–2005

26

Publications

26

Bulk micromachining of silicon

G.T.A. Kovacs, N.I. Maluf, K. Petersen · Proceedings of the IEEE · 1998 · 721 citations

Engineering, Materials Engineering, Materials Science +17

An Introduction to Microelectromechanical Systems Engineering

N.I. Maluf · Measurement Science and Technology · 2002 · 697 citations

Engineering, Electrical Engineering, Systems Engineering +7

A high-performance planar piezoresistive accelerometer

Aaron Partridge, J. K. Reynolds, Benjamin W. Chui et al. · Journal of Microelectromechanical Systems · 2000 · 197 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17

Novel interconnection technologies for integrated microfluidic systems

Bonnie L. Gray, D. Jaeggi, Nicholas J. Mourlas et al. · Sensors and Actuators A Physical · 1999 · 194 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

E.H. Klaassen, K. Petersen, J.M. Noworolski et al. · Sensors and Actuators A Physical · 1996 · 192 citations

Engineering, Materials Engineering, Materials Science +14

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