Measurement Science and Technology · 2002 · 697 citations · 57 references
EngineeringElectrical EngineeringSystems EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems DesignMems FabricationMems ModelingMems Reliability
MEMS are miniature integrated devices that combine mechanical and electrical components, providing size, cost, and performance advantages over conventional technologies. This book aims to introduce readers to MEMS engineering, addressing common questions and guiding newcomers through the fundamentals.
If you've not been involved in MEMS (MicroElectroMechanical Systems) technology or had the cause to use MEMS devices, then you may wonder what all the fuss is about. What are MEMS anyway? What's the difference between MEMS and MST (MicroSystems Technology)? What are the advantages over existing technologies? If you have ever found yourself pondering over such questions, then this book may be for you.
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Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations
Analysis of Bi-Metal Thermostats
S. Timoshenko · Journal of the Optical Society of America · 1925 · 2.4K citations
Micromachined inertial sensors
N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations
Engineering, Electrical Engineering, Mechanical Engineering +17
Stress-related effects in thin films
John A. Thornton, David W. Hoffman · Thin Solid Films · 1989 · 1.1K citations
Natural Sciences, Materials Engineering, Materials Science +14