An Introduction to Microelectromechanical Systems Engineering

TLDR

MEMS are miniature integrated devices that combine mechanical and electrical components, providing size, cost, and performance advantages over conventional technologies. This book aims to introduce readers to MEMS engineering, addressing common questions and guiding newcomers through the fundamentals.

Abstract

If you've not been involved in MEMS (MicroElectroMechanical Systems) technology or had the cause to use MEMS devices, then you may wonder what all the fuss is about. What are MEMS anyway? What's the difference between MEMS and MST (MicroSystems Technology)? What are the advantages over existing technologies? If you have ever found yourself pondering over such questions, then this book may be for you.