A. Heuberger

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Publications

Citations

2.6K

H-Index

Active since

1979

Affiliations

Fraunhofer Institute for Microengineering and Microsystems(Current)

Fraunhofer-Gesellschaft

Technische Universität Berlin

Siemens (Germany)

Messerschmitt-Bölkow-Blohm (Germany)

A. Heuberger is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsSynchrotron RadiationInstrumentationMicrofabricationMicroscopyOptical MaterialsElectrical Engineering

Publications per year

1979–1996

Publications

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Engineering, Water Molecules, Silicon On Insulator +20

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: II . Influence of Dopants

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 376 citations

Engineering, Semiconductor Materials, Silicon On Insulator +23

Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

Eberhard Backer, W. Ehrfeld, D. Münchmeyer et al. · Die Naturwissenschaften · 1982 · 199 citations

Materials Science, Chemical Engineering, Engineering +9

X-ray lithography

A. Heuberger · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 127 citations

Optical Materials, Engineering, Electron-beam Lithography +20

X-ray lithography

A. Heuberger · Microelectronic Engineering · 1986 · 32 citations

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