Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

Focused ion beam technology and applications

J. Melngailis · 1987 · 611 citations

Engineering, Materials Science, Physics +11

Unified disorder induced gap state model for insulator–semiconductor and metal–semiconductor interfaces

Hideki Hasegawa, Hideo Ohno · 1986 · 495 citations

Natural Sciences, Materials Science, Physics +16

Tunneling spectroscopy of the GaAs(110) surface

R. M. Feenstra, Joseph A. Stroscio · 1987 · 421 citations

Natural Sciences, Materials Engineering, Materials Science +17

The advanced unified defect model for Schottky barrier formation

W. E. Spicer, Z. Liliental‐Weber, E. R. Weber et al. · 1988 · 397 citations

Engineering, Materials Science, Physics +17

Low-temperature growth of silicon dioxide films: A study of chemical bonding by ellipsometry and infrared spectroscopy

G. Lucovsky, M. J. Mantini, J. K. Srivastava et al. · 1987 · 395 citations

Natural Sciences, Materials Science, Physics +17