Venue (Journal)
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
Also Known As
Microelectronics processing and phenomena, Journal of vacuum science and technology.
2.7K
Publications
63K
Citations
502
Concepts
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 102 | 1.5K | 56.8K |
2 | Natural Sciences | 37 | 155 | 5.3K |
3 | Health Sciences | 24 | 54 | 2.3K |
4 | Medicine | 18 | 29 | 836 |
5 | Education | 11 | 15 | 345 |
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
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2.7K
Publications
63K
Citations
Showing yearly statistics from 2000-2026.
| Year | Citations | |
|---|---|---|
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