Low-temperature growth of silicon dioxide films: A study of chemical bonding by ellipsometry and infrared spectroscopy

G. Lucovsky, M. J. Mantini, J. K. Srivastava, +1

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

Optical MaterialsEngineeringLow-temperature GrowthSilicon Dioxide FilmsChemistry +16

Local atomic structure in thin films of silicon nitride and silicon diimide produced by remote plasma-enhanced chemical-vapor deposition

D. V. Tsu, G. Lucovsky, M. J. Mantini

Physical review. B, Condensed matter

Materials ScienceEngineeringPhysicsCrystalline DefectsNatural Sciences +13

Deposition of silicon oxynitride thin films by remote plasma enhanced chemical vapor deposition

D. V. Tsu, G. Lucovsky, M. J. Mantini, +1

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Materials ScienceRemote PlasmaOptical MaterialsEngineeringHomogeneous Alloy +13

A study of chemical bonding in suboxides of silicon using Auger electron spectroscopy

S. S. Chao, John E. Tyler, Yasuo Takagi, +5

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringChemistrySilicon On InsulatorSemiconductorsMaterials Science +14

Carbon and oxygen removal from silicon (100) surfaces by remote plasma cleaning techniques

R. E. Thomas, M. J. Mantini, R. A. Rudder, +3

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringChemistryPlasma ProcessingChemical EngineeringHydrogen Plasma +17

Auger electron spectroscopy studies of silicon nitride, oxide, and oxynitride thin films: Minimization of surface damage by argon and electron beams

S. S. Chao, John E. Tyler, D. V. Tsu, +2

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Materials ScienceElectrical EngineeringIon ImplantationEngineeringCrystalline Defects +13

The role of atomic hydrogen and its influence on the enhancement of secondary electron emission from C(001) surfaces

T. P. Humphreys, R. E. Thomas, D.P. Malta, +6

Applied Physics Letters

Surface CharacterizationDiamond-like CarbonChemical EngineeringEngineeringHydrogen Transition +13

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> cleaning of GaAs surfaces using hydrogen dissociated with a remote noble-gas discharge

S. V. Hattangady, R. A. Rudder, M. J. Mantini, +3

Journal of Applied Physics

EngineeringGlow DischargeSurface ProcessingSemiconductorsChemical Engineering +17

Secondary electron emission enhancement and defect contrast from diamond following exposure to atomic hydrogen

D.P. Malta, J. B. Posthill, T. P. Humphreys, +6

Applied Physics Letters

EngineeringHot Filament CrackingSurface ConductanceCorrosionElectron Spectroscopy +16

The role of an ultrathin silicon interlayer at the SiO2-Ge interface

S. V. Hattangady, M. J. Mantini, G. G. Fountain, +2

Journal of Applied Physics

EngineeringOptoelectronic DevicesSilicon On InsulatorSilicon InterlayerSemiconductors +17