M. J. Mantini

Low-temperature growth of silicon dioxide films: A study of chemical bonding by ellipsometry and infrared spectroscopy

G. Lucovsky, M. J. Mantini, J. K. Srivastava et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 393 citations

Optical Materials, Engineering, Low-temperature Growth +18

Local atomic structure in thin films of silicon nitride and silicon diimide produced by remote plasma-enhanced chemical-vapor deposition

D. V. Tsu, G. Lucovsky, M. J. Mantini · Physical review. B, Condensed matter · 1986 · 306 citations

Materials Science, Engineering, Physics +15

Deposition of silicon oxynitride thin films by remote plasma enhanced chemical vapor deposition

D. V. Tsu, G. Lucovsky, M. J. Mantini et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 77 citations

Materials Science, Remote Plasma, Optical Materials +15

A study of chemical bonding in suboxides of silicon using Auger electron spectroscopy

S. S. Chao, John E. Tyler, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 67 citations

Engineering, Chemistry, Silicon On Insulator +16

Carbon and oxygen removal from silicon (100) surfaces by remote plasma cleaning techniques

R. E. Thomas, M. J. Mantini, R. A. Rudder et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 51 citations

Engineering, Chemistry, Plasma Processing +19