S. S. Chao

Infrared spectroscopic study of SiO<i>x</i> films produced by plasma enhanced chemical vapor deposition

P. G. Pai, S. S. Chao, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 794 citations

Materials Science, Oxygen Concentration, Engineering +12

Oxygen-bonding environments in glow-discharge-deposited amorphous silicon-hydrogen alloy films

G. Lucovsky, J. Yang, S. S. Chao et al. · Physical review. B, Condensed matter · 1983 · 431 citations

Engineering, Optoelectronic Devices, Chemistry +20

Critical volume fraction of crystallinity for conductivity percolation in phosphorus-doped Si:F:H alloys

Raphael Tsu, J. González‐Hernández, S. S. Chao et al. · Applied Physics Letters · 1982 · 356 citations

Materials Science, Engineering, Physics +14

Chemical bonding of hydrogen and oxygen in glow-discharge<i>–</i>deposited thin films of<i>a</i>-Ge:H and<i>a</i>-Ge:(H,O)

G. Lucovsky, S. S. Chao, J. Yang et al. · Physical review. B, Condensed matter · 1985 · 90 citations

Monohydride Bonding, Engineering, Glow Discharge +19

Deposition of silicon oxynitride thin films by remote plasma enhanced chemical vapor deposition

D. V. Tsu, G. Lucovsky, M. J. Mantini et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 77 citations

Materials Science, Remote Plasma, Optical Materials +15