P. G. Pai

Infrared spectroscopic study of SiO<i>x</i> films produced by plasma enhanced chemical vapor deposition

P. G. Pai, S. S. Chao, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 794 citations

Materials Science, Oxygen Concentration, Engineering +12

A study of chemical bonding in suboxides of silicon using Auger electron spectroscopy

S. S. Chao, John E. Tyler, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 67 citations

Engineering, Chemistry, Silicon On Insulator +16

Chemical states study of Si in SiOx films grown by PECVD

S. S. Chao, Yasuo Takagi, G. Lucovsky et al. · Applied Surface Science · 1986 · 65 citations

Materials Science, Chemical Engineering, Siox Films +9

pH-Responsive One-Dimensional Periodic Relief Grating of Polymer Brush–Gold Nanoassemblies on Silicon Surface

Jem-Kun Chen, P. G. Pai, Jia‐Yaw Chang et al. · ACS Applied Materials & Interfaces · 2012 · 37 citations

Local atomic structure of silicon suboxides (SiOx, x &lt; 2)

G. Lucovsky, S. Y. Lin, P. D. Richard et al. · Journal of Non-Crystalline Solids · 1985 · 33 citations

Materials Science, Engineering, Surface Science +6