S. Y. Lin

Local atomic structure of silicon suboxides (SiOx, x < 2)

G. Lucovsky, S. Y. Lin, P. D. Richard et al. · Journal of Non-Crystalline Solids · 1985 · 33 citations

Materials Science, Engineering, Surface Science +6

Deposition of <i>a</i>-Si,Sn:H alloy films by reactive magnetron sputtering from separate Si and Sn targets

Gregory N. Parsons, J. W. Cook, G. Lucovsky et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 19 citations

Engineering, Dual Magnetron, Thin Film Process Technology +17

A study of electronic states in a-SiOx and a-SiNx thin films by infrared, auger electron and X-ray photoelectron spectroscopies

S. S. Chao, G. Lucovsky, S. Y. Lin et al. · Journal of Non-Crystalline Solids · 1985 · 17 citations

Materials Science, Engineering, Electron Spectroscopy +7

Low temperature deposition of amorphous silicon oxide and silicon nitride films

P. D. Richard, D. V. Tsu, G. Lucovsky et al. · Journal of Non-Crystalline Solids · 1985 · 10 citations

Materials Science, Engineering, Silicon On Insulator +8