R. A. Rudder

Thermal desorption from hydrogenated and oxygenated diamond (100) surfaces

R. E. Thomas, R. A. Rudder, R. J. Markunas · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 222 citations

Engineering, Chemistry, Molecular Hydrogen +18

Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing

N.R. Parikh, John Hunn, E. McGucken et al. · Applied Physics Letters · 1992 · 152 citations

Materials Engineering, Materials Science, Diamond-like Carbon +10

On the feasibility of growing dilute C<i>x</i>Si1−<i>x</i> epitaxial alloys

J. B. Posthill, R. A. Rudder, S. V. Hattangady et al. · Applied Physics Letters · 1990 · 91 citations

Materials Engineering, Materials Science, Semiconductors +11

Remote plasma-enhanced chemical-vapor deposition of epitaxial Ge films

R. A. Rudder, G. G. Fountain, R. J. Markunas · Journal of Applied Physics · 1986 · 79 citations

Materials Science, Deposition Precursor Species, Epitaxial Growth +11

Direct deposition of polycrystalline diamond films on Si(100) without surface pretreatment

R. A. Rudder, G. Hudson, J. B. Posthill et al. · Applied Physics Letters · 1991 · 72 citations

Engineering, Solid-state Chemistry, Chemical Deposition +17