Concepedia
Statistics
Publications
48
Citations
2K
H-Index
26
Active since
1985
Affiliations
RTI International(Current)
North Carolina State University
Research Triangle Park Foundation
Triangle
R. J. Markunas is an author at RTI International specializing in materials science, materials engineering, and natural sciences.
Publications per year
1985–2003
Deposition of silicon dioxide and silicon nitride by remote plasma enhanced chemical vapor deposition
G. Lucovsky, P. D. Richard, D. V. Tsu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 238 citations
Natural Sciences, Materials Engineering, Materials Science +17
Thermal desorption from hydrogenated and oxygenated diamond (100) surfaces
R. E. Thomas, R. A. Rudder, R. J. Markunas · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 223 citations
Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing
N.R. Parikh, John Hunn, E. McGucken et al. · Applied Physics Letters · 1992 · 154 citations
Natural Sciences, Materials Engineering, Materials Science +12
On the feasibility of growing dilute C<i>x</i>Si1−<i>x</i> epitaxial alloys
J. B. Posthill, R. A. Rudder, S. V. Hattangady et al. · Applied Physics Letters · 1990 · 91 citations
Remote plasma-enhanced chemical-vapor deposition of epitaxial Ge films
R. A. Rudder, G. G. Fountain, R. J. Markunas · Journal of Applied Physics · 1986 · 79 citations
Natural Sciences, Materials Engineering, Materials Science +16
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