Concepedia

D. Münchmeyer

DM

17

Publications

1.8K

Citations

15

H-Index

1978

Active since

Affiliations

FZI Research Center for Information Technology(Current)

Karlsruhe Institute of Technology

Siemens (Germany)

Swiss Federal Nuclear Safety Inspectorate

STEAG (Germany)

D. Münchmeyer is an author at FZI Research Center for Information Technology specializing in engineering, microfabrication, and materials science.

Top concepts

EngineeringMicrofabricationMaterial ScienceApplied Physics3D PrintingMechanical EngineeringPhotonicsMicrostructureMicroelectronicsMaterials Fabrication

Publications per year

1978–2003

17

Publications

17

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 957 citations

Materials Science, Engineering, Plastic Moulding +10

Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

Eberhard Backer, W. Ehrfeld, D. Münchmeyer et al. · Die Naturwissenschaften · 1982 · 199 citations

Materials Science, Chemical Engineering, Engineering +9

Three-dimensional microfabrication using synchrotron radiation

W. Ehrfeld, D. Münchmeyer · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1991 · 127 citations

Engineering, Micromachines, Microfabrication +5

The LIGA technique-what are the new opportunities

Arnd Rogner, Joanne Eicher, D. Münchmeyer et al. · Journal of Micromechanics and Microengineering · 1992 · 104 citations

Materials Science, Methodological Development, New Opportunities +12

LIGA process: sensor construction techniques via X-ray lithography

W. Ehrfeld, Fabian Götz, D. Münchmeyer et al. · 2003 · 56 citations

Engineering, Target Fabrication, Microelectromechanical Systems +18

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