Concepedia

Fabian Götz

FG

2

Publications

112

Citations

2

H-Index

1988

Active since

Affiliations

FZI Research Center for Information Technology(Current)

Fabian Götz is an author at FZI Research Center for Information Technology specializing in microfabrication, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabricationMaterials FabricationPhotonicsInstrumentationOptical SensorsNanomanufacturingBiomedical Sensors

Publications per year

1988–2003

2

Publications

2

LIGA process: sensor construction techniques via X-ray lithography

W. Ehrfeld, Fabian Götz, D. Münchmeyer et al. · 2003 · 56 citations

Engineering, Target Fabrication, Microelectromechanical Systems +18

Progress in deep-etch synchrotron radiation lithography

W. Ehrfeld, P. Bley, Fabian Götz et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 56 citations

Materials Science, Photonics, Engineering +15

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