The LIGA technique-what are the new opportunities

Abstract

The LIGA process, which is based on deep-etch X-ray lithography, electroplating, and moulding allows the commercial fabrication of three-dimensional microstructures. The actual state of the art of the LIGA process is summarized. This contains new process developments, like the possibility of realizing movable, stepped or inclined microstructures as well as the availability of new materials like nickel-cobalt alloys or ceramics. In the second part, applications of LIGA structures demonstrating the characteristic LIGA properties are presented. Examples are given for the fields of sensors, actuators and communication technologies.