Journal of Micromechanics and Microengineering · 1992 · 104 citations · 17 references
EngineeringMaterials EngineeringMaterials ScienceActuatorsMicroelectromechanical SystemsMicrofabricationFabrication MaterialsMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningMicrostructure ControlCobalt-chromium AlloysFabricationLiga ProcessMicrostructure FabricationMold FabricationNickel AlloysNickel-based AlloysX-ray Lithography
The LIGA process, which is based on deep-etch X-ray lithography, electroplating, and moulding allows the commercial fabrication of three-dimensional microstructures. The actual state of the art of the LIGA process is summarized. This contains new process developments, like the possibility of realizing movable, stepped or inclined microstructures as well as the availability of new materials like nickel-cobalt alloys or ceramics. In the second part, applications of LIGA structures demonstrating the characteristic LIGA properties are presented. Examples are given for the fields of sensors, actuators and communication technologies.
17
Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations
E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations