Concepedia

Mold Fabrication

Mold Fabrication is a specialized process in nanoimprint lithography involving the design and creation of a high-precision master template, distinguished by its role in defining nanoscale patterns that are subsequently transferred to a substrate through physical deformation of a resist material.

878

Publications

41.1K

Citations

3.3K

Authors

757

Institutions

Publications per year

2017–2026

172

Parents

Publications

878

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

, , +15

Nanoimprint Lithography: Methods and Material Requirements

L. Jay Guo · Advanced Materials · 2007 · 1.8K citations · Full text

, , +17

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

, , +16

Towards greener nanoimprint processes

Clothilde Péra, Jean Baptiste Doucet, F. Carcenac et al. · HAL (Le Centre pour la Communication Scientifique Directe) · 2022 · 828 citations · Full text

, , +12

Recent progress in soft lithography

John A. Rogers, Ralph G. Nuzzo · Materials Today · 2005 · 501 citations · Full text

, , +11

1–5 of 878

Authors

3.3K

  1. JT
    Jun Taniguchi

    Tokyo University of Science, Japan

    18 publications · 531 citations

    14

    h-index

  2. YH
    Yoshihiko Hirai

    Osaka Prefecture University, Japan

    18 publications · 647 citations

    14

    h-index

  3. MT
    Masaharu Takahashi

    Chiba University, Japan

    13 publications · 327 citations

    12

    h-index

  4. HH
    Hiroshi Hiroshima

    National Institute of Advanced Industrial Science and Technology, Japan

    11 publications · 443 citations

    11

    h-index

  5. HM
    Hideki Masuda

    Tokyo Metropolitan University, Japan

    10 publications · 248 citations

    10

    h-index

1–5 of 3.3K

Institutions

757

  1. Seoul National University

    Seoul, South Korea

    20 h-index

    67 publications

    4.5K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    18 h-index

    103 publications

    3.5K citations

  3. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    16 h-index

    55 publications

    2.3K citations

  4. National Institute of Advanced Industrial Science and Technology

    Tsukuba, Japan

    16 h-index

    69 publications

    1.6K citations

  5. Massachusetts Institute of Technology

    Cambridge, United States

    15 h-index

    42 publications

    1.8K citations

  6. Chinese Academy of Sciences

    Beijing, China

    15 h-index

    71 publications

    3.6K citations

  7. Osaka Prefecture University

    Sakai, Japan

    14 h-index

    78 publications

    2.5K citations

  8. Tokyo University of Science

    Tokyo, Japan

    14 h-index

    49 publications

    1.6K citations

1–8 of 757

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 60 publications · 2.6K citations

    30

    h-index

  2. Microelectronic Engineering

    108 publications · 4K citations

    30

    h-index

  3. 22

    h-index

  4. Advanced Materials

    25 publications · 3.3K citations

    20

    h-index

  5. Japanese Journal of Applied Physics

    JJAP · 40 publications · 1.2K citations

    20

    h-index

1–5