Yoshihiko Hirai

Defect analysis in thermal nanoimprint lithography

Yoshihiko Hirai, Satoshi Yoshida, Nobuyuki Takagi · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 180 citations

Engineering, Manufacturing Engineering, Materials Science +16

Simulation and experimental study of polymer deformation in nanoimprint lithography

Yoshihiko Hirai, Takaaki Konishi, Takashi Yoshikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 173 citations

Engineering, Materials Engineering, Materials Science +17

Study of the resist deformation in nanoimprint lithography

Yoshihiko Hirai, Masaki Fujiwara, Takahiro Okuno et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 145 citations

Natural Sciences, Materials Engineering, Materials Science +17

Mold Surface Treatment for Imprint Lithography.

Yoshihiko Hirai, Satoshi Yoshida, Akio Okamoto et al. · Journal of Photopolymer Science and Technology · 2001 · 106 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

High Aspect Pattern Fabrication by Nano Imprint Lithography Using Fine Diamond Mold

Yoshihiko Hirai, Satoshi Yoshida, Nobuyuki Takagi et al. · Japanese Journal of Applied Physics · 2003 · 81 citations

Engineering, Materials Engineering, Materials Science +12