Statistics
Publications
75
Citations
3.3K
H-Index
32
Active since
1967
Satoshi Yoshida is an author at University of Shiga Prefecture specializing in materials science, materials engineering, and natural sciences.
Publications per year
1967–2023
75
75
Defect analysis in thermal nanoimprint lithography
Yoshihiko Hirai, Satoshi Yoshida, Nobuyuki Takagi · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 180 citations
Engineering, Manufacturing Engineering, Materials Science +16
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