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Secondary Electrons in EUV Lithography
Justin Torok, Ryan Del Re, Henry Herbol et al. · 2013 · 108 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +9
Mold Surface Treatment for Imprint Lithography.
Yoshihiko Hirai, Satoshi Yoshida, Akio Okamoto et al. · 2001 · 106 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
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