9
Publications
503
Citations
9
H-Index
2013
Active since
Henry Herbol is an author at Cornell University specializing in engineering, chemistry, and hybrid materials.
Top concepts
EngineeringChemistryPhysicsPhotochemistryApplied PhysicsOptoelectronicsHybrid MaterialsMaterial ScienceInorganic ChemistryFunctional Materials
Publications per year
2013–2020
9
9
Secondary Electrons in EUV Lithography
Justin Torok, Ryan Del Re, Henry Herbol et al. · Journal of Photopolymer Science and Technology · 2013 · 97 citations · Full text
Engineering, Electron-beam Lithography, Monte-carlo Modelling +14
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1–5 of 9