Statistics
Publications
10
Citations
363
H-Index
10
Active since
1980
Affiliations
Kazunori Sakai is an author at Cornell University specializing in engineering, materials science, and chemistry.
Publications per year
1980–2019
10
10
EUV photolithography: resist progress and challenges
Hong Xu, Vasiliki Kosma, Emmanuel P. Giannelis et al. · 2018 · 30 citations
1–5 of 10