Concepedia

Author

Kazuki Kasahara

Cornell University

Also Known As

Kazuki Kasahara

10

Publications

259

Citations

7

H-Index

33

Concepts

All Affiliations

Cornell UniversityJSR (Japan)Division of Materials Science and Engineering
KK

About

Kazuki Kasahara is an author at Cornell University specializing in materials science, engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

237

2

Applied Physics

5

5

117

3

Chemistry

3

3

165

4

Natural Sciences

1

1

35

5

Chemical Engineering

1

1

13

Kazuki Kasahara

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6

Publications

237

Citations

6

H-Index

YearCitations

Metal–Organic Framework-Inspired Metal-Containing Clusters for High-Resolution Patterning

Hong Xu, Kazunori Sakai, Kazuki Kasahara,

Chemistry of Materials

2018

120

Nanoparticle photoresist studies for EUV lithography

Kazuki Kasahara, Hong Xu, Vasiliki Kosma,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2017

36

Elucidating the patterning mechanism of zirconium-based hybrid photoresists

Vasiliki Kosma, Kazuki Kasahara, Hong Xu,

Journal of Micro/Nanolithography MEMS and MOEMS

2017

35

Recent progress in nanoparticle photoresists development for EUV lithography

Kazuki Kasahara, Vasiliki Kosma, Jérémy Odent,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2016

23

Recent Progress in EUV Metal Oxide Photoresists

Kazuki Kasahara, Hong Xu, Vasiliki Kosma,

Journal of Photopolymer Science and Technology

2017

13

Positive Tone Nanoparticle Photoresists: New Insight on the Patterning Mechanism

Mufei Yu, Hong Xu, Vasiliki Kosma,

Journal of Photopolymer Science and Technology

2016

10

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