Concepedia

Kazuki Kasahara

KK

6

Publications

237

Citations

6

H-Index

2016

Active since

Affiliations

Cornell University(Current)

Division of Materials Science and Engineering

Kazuki Kasahara is an author at Cornell University specializing in materials science, engineering, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsNanomaterialsNanotechnologyChemistryNanofabricationPhotochemistrySurface ScienceMicroelectronics

Publications per year

2016–2018

6

Publications

6

Metal–Organic Framework-Inspired Metal-Containing Clusters for High-Resolution Patterning

Hong Xu, Kazunori Sakai, Kazuki Kasahara et al. · Chemistry of Materials · 2018 · 120 citations

Materials Science, Inorganic Chemistry, Extreme Ultraviolet Lithography +15

Nanoparticle photoresist studies for EUV lithography

Kazuki Kasahara, Hong Xu, Vasiliki Kosma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 36 citations

Engineering, Electron-beam Lithography, Microscopy +17

Elucidating the patterning mechanism of zirconium-based hybrid photoresists

Vasiliki Kosma, Kazuki Kasahara, Hong Xu et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2017 · 35 citations

Engineering, Electron-beam Lithography, Zirconium-based Hybrid Photoresists +17

Recent progress in nanoparticle photoresists development for EUV lithography

Kazuki Kasahara, Vasiliki Kosma, Jérémy Odent et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 23 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Recent Progress in EUV Metal Oxide Photoresists

Kazuki Kasahara, Hong Xu, Vasiliki Kosma et al. · Journal of Photopolymer Science and Technology · 2017 · 13 citations · Full text

Engineering, Electron-beam Lithography, Euv Lithography +16

Rows per page

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