Venue (Journal)
Journal of Micro/Nanolithography MEMS and MOEMS
Also Known As
JM3, J. Micro/Nanolith. MEMS MOEMS, JM³
1.7K
Publications
17.4K
Citations
504
Concepts
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 47 | 501 | 12.3K |
2 | Medicine | 23 | 54 | 1.3K |
3 | Education | 15 | 20 | 606 |
4 | Health Sciences | 15 | 23 | 592 |
5 | Humanities | 1 | 1 | 33 |
Journal of Micro/Nanolithography MEMS and MOEMS
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1.7K
Publications
17.4K
Citations
Showing yearly statistics from 2000-2026.
| Year | Citations | |
|---|---|---|
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