Concepedia

Ryan Del Re

RD

11

Publications

625

Citations

11

H-Index

2013

Active since

Affiliations

SUNY New Paltz(Current)

Paul Scherrer Institute

Center for Nanoscale Science and Technology

Purchase College

SUNY Polytechnic Institute

Ryan Del Re is an author at SUNY New Paltz specializing in photochemistry, engineering, and chemistry.

Top concepts

EngineeringPhotochemistryChemistryMaterial ScienceApplied PhysicsNatural SciencesPhysicsPhotocatalysisSurface ScienceOrganic Chemistry

Publications per year

2013–2015

11

Publications

11

Photolithographic properties of tin-oxo clusters using extreme ultraviolet light (13.5nm)

Brian Cardineau, Ryan Del Re, Miles Wilklow‐Marnell et al. · Microelectronic Engineering · 2014 · 169 citations

Materials Science, Engineering, Photochemistry +8

Secondary Electrons in EUV Lithography

Justin Torok, Ryan Del Re, Henry Herbol et al. · Journal of Photopolymer Science and Technology · 2013 · 97 citations · Full text

Engineering, Electron-beam Lithography, Monte-carlo Modelling +14

EUV resists based on tin-oxo clusters

Brian Cardineau, Ryan Del Re, Hashim Al-Mashat et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 57 citations

Engineering, Inorganic Photochemistry, Euv Light +19

Platinum and palladium oxalates: positive-tone extreme ultraviolet resists

Miriam Sortland, Jodi Hotalen, Ryan Del Re et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 57 citations · Full text

Materials Science, Inorganic Chemistry, Engineering +12

Low-line edge roughness extreme ultraviolet photoresists of organotin carboxylates

Ryan Del Re, James Passarelli, Miriam Sortland et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 53 citations · Full text

Materials Science, Organic Material Chemistry, Optical Materials +15

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