Brian Cardineau

Publications

610

Citations

H-Index

2010

Active since

Affiliations

University at Albany, State University of New York(Current)

SUNY New Paltz

Center for Nanoscale Science and Technology

Paul Scherrer Institute

Purchase College

Brian Cardineau is an author at University at Albany, State University of New York specializing in engineering, materials science, and photochemistry.

Top concepts

EngineeringMaterial SciencePhotochemistryApplied PhysicsChemistryPhotocatalysisNatural SciencesOrganic ChemistryPhysicsNanotechnology

Publications per year

2010–2024

Publications

Photolithographic properties of tin-oxo clusters using extreme ultraviolet light (13.5nm)

Brian Cardineau, Ryan Del Re, Miles Wilklow‐Marnell et al. · Microelectronic Engineering · 2014 · 169 citations

Materials Science, Engineering, Photochemistry +8

A new inorganic EUV resist with high-etch resistance

Markos Trikeriotis, Marie Krysak, Yeon Sook Chung et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 67 citations

Nanoparticle photoresists from HfO2 and ZrO2 for EUV patterning

Markos Trikeriotis, Marie Krysaki, Yeon Sook Chung et al. · Journal of Photopolymer Science and Technology · 2012 · 63 citations · Full text

Materials Science, Oxide Nanoparticles, Euv Patterning +11

EUV resists based on tin-oxo clusters

Brian Cardineau, Ryan Del Re, Hashim Al-Mashat et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 57 citations

Engineering, Inorganic Photochemistry, Euv Light +19

Low-line edge roughness extreme ultraviolet photoresists of organotin carboxylates

Ryan Del Re, James Passarelli, Miriam Sortland et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 53 citations · Full text

Materials Science, Organic Material Chemistry, Optical Materials +15

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