Concepedia

Photolithographic properties of tin-oxo clusters using extreme ultraviolet light (13.5nm)

Brian Cardineau, Ryan Del Re, Miles Wilklow‐Marnell, Hashim Al-Mashat, Michaela Vockenhuber, Yasin Ekinci, Chandra Sarma, Daniel Freedman, Robert L. Brainard

Microelectronic Engineering · 2014 · 184 citations · 38 references

DOI

Concepts

References

38

CRC handbook of organic photochemistry and photobiology

Choice Reviews Online · 1996 · 1.4K citations

, , +17

Handbook of bond dissociation energies in organic compounds

Choice Reviews Online · 2003 · 752 citations

, , +13

Photodecarboxylation: mechanism and synthetic utility

David Budac, Peter Wan · Journal of Photochemistry and Photobiology A Chemistry · 1992 · 170 citations

, , +4

Hydrolysis of Monobutyltin Trialkoxides: Synthesis and Characterizations of {(BuSn)12O14(OH)6}(OH)2

Frédéric Banse, François Ribot, P. Tolédano et al. · Inorganic Chemistry · 1995 · 149 citations

, , +6

Shot noise, LER, and quantum efficiency of EUV photoresists

Robert L. Brainard, Peter Trefonas, Jeroen H. Lammers et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 141 citations

, , +13