Photolithographic properties of tin-oxo clusters using extreme ultraviolet light (13.5nm)

Brian Cardineau, Ryan Del Re, Miles Wilklow‐Marnell, Hashim Al-Mashat, Michaela Vockenhuber, Yasin Ekinci, Chandra Sarma, Daniel Freedman, Robert L. Brainard

Microelectronic Engineering · 2014 · 169 citations · 38 references

Concepts

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