Concepedia

Publication | Closed Access

Photolithographic properties of tin-oxo clusters using extreme ultraviolet light (13.5nm)

DOI

169

Citations

38

References

2014

Year

Brian Cardineau, Ryan Del Re, Miles Wilklow‐Marnell, Hashim Al-Mashat, Michaela Vockenhuber, Yasin Ekinci, Chandra Sarma, Daniel Freedman, Robert L. Brainard
Microelectronic Engineering

References

YearCitations

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