Robert L. Brainard

Suppression of unwanted heterogeneous platinum(0)-catalyzed reactions by poisoning with mercury(0) in systems involving competing homogeneous reactions of soluble organoplatinum compounds: thermal decomposition of bis(triethylphosphine)-3,3,4,4-tetramethylplatinacyclopentane

George M. Whitesides, Marifaith. Hackett, Robert L. Brainard et al. · Organometallics · 1985 · 343 citations

Natural Sciences, Chemistry, Toxicology +9

Photolithographic properties of tin-oxo clusters using extreme ultraviolet light (13.5nm)

Brian Cardineau, Ryan Del Re, Miles Wilklow‐Marnell et al. · Microelectronic Engineering · 2014 · 184 citations

Natural Sciences, Materials Engineering, Materials Science +11

Shot noise, LER, and quantum efficiency of EUV photoresists

Robert L. Brainard, Peter Trefonas, Jeroen H. Lammers et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 141 citations

Engineering, Electrical Engineering, Materials Science +13

Secondary Electrons in EUV Lithography

Justin Torok, Ryan Del Re, Henry Herbol et al. · Journal of Photopolymer Science and Technology · 2013 · 108 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +9

Evaluation of EUV resist materials for use at the 32 nm half-pitch node

Thomas I. Wallow, Craig Higgins, Robert L. Brainard et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 108 citations

Natural Sciences, Materials Engineering, Materials Science +8