Jeroen H. Lammers

Shot noise, LER, and quantum efficiency of EUV photoresists

Robert L. Brainard, Peter Trefonas, Jeroen H. Lammers et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 141 citations

Engineering, Electrical Engineering, Materials Science +13

Lithographic importance of acid diffusion in chemically amplified resists

David Van Steenwinckel, Jeroen H. Lammers, Leonardus H. A. Leunissen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 72 citations

Engineering, Materials Engineering, Contrast Sensitivity +12

Resist effects at small pitches

David Van Steenwinckel, Jeroen H. Lammers, Thomas Koehler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 40 citations

Engineering, Materials Engineering, Materials Science +13

Green’s function for steady flow over a small two-dimensional topography

M. Hayes, S. O’Brien, Jeroen H. Lammers · Physics of Fluids · 2000 · 36 citations

Natural Sciences, Materials Engineering, Fluid Dynamics +16

Concentration waves and the instability of bubbly flows

Jeroen H. Lammers, A. Biesheuvel · Journal of Fluid Mechanics · 1996 · 34 citations

Natural Sciences, Chemical Engineering, Physics +17