Leonardus H. A. Leunissen

Line edge roughness and critical dimension variation: Fractal characterization and comparison using model functions

Vassilios Constantoudis, G. P. Patsis, Leonardus H. A. Leunissen · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 98 citations

Engineering, Roughness Algorithm, Measurement +18

Lithographic importance of acid diffusion in chemically amplified resists

David Van Steenwinckel, Jeroen H. Lammers, Leonardus H. A. Leunissen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 71 citations

Materials Science, Engineering, Specific Resistance +10

Influence of gate patterning on line edge roughness

Leonardus H. A. Leunissen, R. Jonckheere, Kurt Ronse et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 38 citations

Electrical Engineering, Physical Design (Electronics), Engineering +9

Void-Free Filling of HAR TSVs Using a Wet Alkaline Cu Seed on CVD Co as a Replacement for PVD Cu Seed

Silvia Armini, Zaid El-Mekki, K. Vandersmissen et al. · Journal of The Electrochemical Society · 2010 · 38 citations

Materials Engineering, Materials Science, Chemical Engineering +13

Fundamental Investigation of Chemical Mechanical Polishing of GaAs in Silica Dispersions: Material Removal and Arsenic Trihydride Formation Pathways

John B. Matovu, Patrick Ong, Leonardus H. A. Leunissen et al. · ECS Journal of Solid State Science and Technology · 2013 · 38 citations

Materials Science, Materials Engineering, Chemical Engineering +15