Concepedia

Marie Krysak

MK

Statistics

Publications

11

Citations

355

H-Index

10

Active since

2007

Affiliations

Cornell University(Current)

Intel (United States)

Rochester Institute of Technology

University at Albany, State University of New York

Marie Krysak is an author at Cornell University specializing in materials science, natural sciences, and materials engineering.

Publications per year

2007–2017

11

Publications

11

Development of an inorganic photoresist for DUV, EUV, and electron beam imaging

Markos Trikeriotis, Woo Jin Bae, Evan L. Schwartz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 72 citations

, , +17

A new inorganic EUV resist with high-etch resistance

Markos Trikeriotis, Marie Krysak, Yeon Sook Chung et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 70 citations

, , +17

Development of an inorganic nanoparticle photoresist for EUV, e-beam, and 193nm lithography

Marie Krysak, Markos Trikeriotis, Evan L. Schwartz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 64 citations

, , +17

Oxide nanoparticle EUV resists: toward understanding the mechanism of positive and negative tone patterning

Souvik Chakrabarty, Christine Ouyang, Marie Krysak et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 34 citations

, , +16

Investigation of novel inorganic resist materials for EUV lithography

Marie Krysak, James M. Blackwell, Steve Putna et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 28 citations

, , +14

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