Mems Fabrication

MEMS Fabrication is a specialized microfabrication process that belongs to the broader class of semiconductor manufacturing techniques and is distinguished by its integration of mechanical and electrical components at the microscale through batch-processing methods such as photolithography, etching, and deposition to realize functional Microelectromechanical Systems.

7.8K

Publications

348K

Citations

21.8K

Authors

2.8K

Institutions

Publications per year

2017–2026

1.3K

Parents

Microelectromechanical Systems

Children

Anisotropic EtchingCleanroom Process IntegrationDeep Reactive Ion EtchingElectroplatingHigh-aspect-ratio MicromachiningHydrogen Silsesquioxane ProcessingLiga ProcessMask Design For MemsMetallizationMicrocontact Printing

Publications

7.8K

SOFT LITHOGRAPHY

Younan Xia, George M. Whitesides · Annual Review of Materials Science · 1998 · 4.6K citations

Engineering, Materials Engineering, Materials Science +16

Micromachined inertial sensors

N. Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE · 1998 · 1.8K citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Manufacturing engineering and technology

Choice Reviews Online · 1990 · 1.6K citations

Engineering, Manufacturing Engineering, Materials Science +17

The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture

Mohamed Gad‐el‐Hak · Journal of Fluids Engineering · 1999 · 1.3K citations

Engineering, Manufacturing Engineering, Mechanical Engineering +16

Microreaction engineering — is small better?

Klavs F. Jensen · Chemical Engineering Science · 2001 · 1.1K citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +10

1–5 of 7.8K

Authors

21.8K

RT
Roger T. Howe
University of California, Berkeley, United States
54 publications · 4.3K citations
33
h-index
HX
Huikai Xie
University of Florida, United States
45 publications · 2K citations
26
h-index
AP
Albert P. Pisano
University of California, Berkeley, United States
28 publications · 2.1K citations
23
h-index
AM
Andrei M. Shkel
University of California, Irvine, United States
34 publications · 1.4K citations
23
h-index
VM
Victor M. Bright
University of Colorado Boulder, United States
40 publications · 1.5K citations
23
h-index

1–5 of 21.8K

Institutions

2.8K

1–8 of 2.8K

Venues

Journal of Microelectromechanical Systems
442 publications · 27.1K citations
87
h-index
Sensors and Actuators A Physical
576 publications · 31.9K citations
87
h-index
Journal of Micromechanics and Microengineering
JMM · 678 publications · 29.5K citations
78
h-index
Microelectronic Engineering
223 publications · 8K citations
45
h-index
Microsystem Technologies
292 publications · 8.2K citations
41
h-index

1–5