Concepedia

Cleanroom Process Integration

Cleanroom Process Integration is a systematic methodology in microelectromechanical systems (MEMS) fabrication that coordinates and optimizes sequential processing steps within a controlled contamination environment to ensure compatibility, yield, and repeatability of device manufacturing.

4

Publications

181

Citations

34

Authors

7

Institutions

Publications per year

2017–2026

2

Parents

Publications

4

Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films

Alexander John Cruz, Ivo Stassen, Mikhail Krishtab et al. · Chemistry of Materials · 2019 · 77 citations · Full text

, , +17

High‐Yield Ti<sub>3</sub>C<sub>2</sub>T<i><sub>x</sub></i> MXene–MoS<sub>2</sub> Integrated Circuits

Xiangming Xu, Tianchao Guo, Mrinal K. Hota et al. · Advanced Materials · 2021 · 48 citations

, , +17

Microfluidic integration of wirebonded microcoils for on-chip applications in nuclear magnetic resonance

R. Meier, Jens Höfflin, Vlad Badilita et al. · Journal of Micromechanics and Microengineering · 2014 · 39 citations

, , +17

Pharmacy cleanroom project management considerations: an experience-based perspective.

Eric S Kastango, Sam DeMarco · PubMed · 2015 · 17 citations

, , +15

1–4 of 4

Authors

34

  1. XZ
    Xixiang Zhang

    King Abdullah University of Science and Technology, Saudi Arabia

    1 publications · 48 citations

    1

    h-index

  2. JM
    Johan Meersschaut

    IMEC, Belgium

    1 publications · 77 citations

    1

    h-index

  3. VB
    Vlad Badilita

    University of Freiburg, Germany

    1 publications · 39 citations

    1

    h-index

  4. SD
    Steven De Feyter

    KU Leuven, Belgium

    1 publications · 77 citations

    1

    h-index

  5. MK
    Mrinal K. Hota

    King Abdullah University of Science and Technology, Saudi Arabia

    1 publications · 48 citations

    1

    h-index

1–5 of 34

Institutions

7

  1. University of Freiburg

    Freiburg im Breisgau, Germany

    1 h-index

    5 publications

    195 citations

  2. King Abdullah University of Science and Technology

    Jeddah, Saudi Arabia

    1 h-index

    10 publications

    480 citations

  3. Parc Científic de la Universitat de València

    Paterna, Spain

    1 h-index

    3 publications

    231 citations

  4. Allergan (United States)

    Madison, United States

    1 h-index

    1 publications

    17 citations

  5. IMEC

    Leuven, Belgium

    1 h-index

    7 publications

    539 citations

  6. Vrije Universiteit Brussel

    Brussels, Belgium

    1 h-index

    4 publications

    308 citations

  7. KU Leuven

    Leuven, Belgium

    1 h-index

    4 publications

    308 citations

1–7 of 7

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 1 publications · 39 citations

    1

    h-index

  2. Chemistry of Materials

    1 publications · 77 citations

    1

    h-index

  3. PubMed

    Repository · 1 publications · 17 citations

    1

    h-index

  4. Advanced Materials

    1 publications · 48 citations

    1

    h-index

1–4