High-k dielectrics for future generation memory devices (Invited Paper)

J. A. Kittl, Karl Opsomer, M. Popovici, +35

Microelectronic Engineering

Electrical EngineeringSemiconductor DeviceEngineeringNanoelectronicsApplied Physics +5

Undoped and <i>in-situ</i> B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition

Benjamin Vincent, Federica Gencarelli, H. Bender, +10

Applied Physics Letters

Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn

Federica Gencarelli, Benjamin Vincent, J. Demeulemeester, +11

ECS Journal of Solid State Science and Technology

Metal‐Insulator Transition in ALD VO₂ Ultrathin Films and Nanoparticles: Morphological Control

Antony Premkumar Peter, Koen Martens, Geert Rampelberg, +12

Advanced Functional Materials

Aluminium NitrideMorphological ControlEngineeringNanosheetTwo-dimensional Materials +15

Spin Density Wave Instability for Chromium in Fe<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mo>/</mml:mo></mml:math>Cr(100) Multilayers

Johan Meersschaut, J. Dekoster, R. Schad, +2

Physical Review Letters

Magnetic PropertiesEngineeringLow-dimensional MagnetismMagnetic ResonanceSpintronic Material +25

Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents

Annelies Delabie, Matty Caymax, Benjamin Groven, +13

Chemical Communications

Materials EngineeringMaterials ScienceChemical EngineeringTransition Metal ChalcogenidesEngineering +11

Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S

Benjamin Groven, Markus Heyne, Ankit Nalin Mehta, +12

Chemistry of Materials

EngineeringTwo-dimensional MaterialsTransition Metal DichalcogenidesChemical DepositionPlasma Processing +15

Electrical Characterization of Ultrathin RF-Sputtered LiPON Layers for Nanoscale Batteries

Brecht Put, Philippe M. Vereecken, Johan Meersschaut, +2

ACS Applied Materials & Interfaces

Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films

Alexander John Cruz, Ivo Stassen, Mikhail Krishtab, +14

Chemistry of Materials

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringOrganic Electronics +12

Two-Dimensional Crystal Grain Size Tuning in WS₂ Atomic Layer Deposition: An Insight in the Nucleation Mechanism

Benjamin Groven, Ankit Nalin Mehta, H. Bender, +14

Chemistry of Materials

EngineeringCrystal Growth TechnologyTwo-dimensional MaterialsChemistryChemical Deposition +19