Three-dimensional microfabrication using synchrotron radiation

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

Fabrication of Microstructures of Extreme Structural Heights by Reaction Injection Molding

Patric Hagmann, W. Ehrfeld · International Polymer Processing · 1989 · 22 citations

Engineering, Materials Engineering, Materials Science +15

Microfabrication of membranes with extreme porosity and uniform pore size

W. Ehrfeld, R. Einhaus, D. Münchmeyer et al. · Journal of Membrane Science · 1988 · 20 citations

Engineering, Materials Engineering, Materials Science +13