Microfabrication of membranes with extreme porosity and uniform pore size

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

Production and use of nuclear tracks: imprinting structure on solids

B.E. Fischer, R. Spohr · Reviews of Modern Physics · 1983 · 291 citations

Natural Sciences, Materials Engineering, Materials Science +12

On the behaviour of asymmetric membranes in pervaporation

R. Rautenbach, Rainer Albrecht · Journal of Membrane Science · 1984 · 44 citations

Engineering, Chemical Engineering, Membrane Science +11

Mask making for synchrotron radiation lithography

W. Ehrfeld, W. Glashauser, D. Münchmeyer et al. · Microelectronic Engineering · 1986 · 17 citations

Engineering, Manufacturing Engineering, Materials Engineering +7