Statistics
Publications
3
Citations
227
H-Index
3
Active since
1982
Affiliations
Siemens (Germany)(Current)
W. Glashauser is an author at Siemens (Germany) specializing in engineering, mask fabrication, and mask work.
Publications per year
1982–2004
3
3
Mask making for synchrotron radiation lithography
W. Ehrfeld, W. Glashauser, D. Münchmeyer et al. · Microelectronic Engineering · 1986 · 17 citations
Engineering, Manufacturing Engineering, Materials Engineering +7
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