Concepedia

Plasma Etching

Plasma Etching is a material processing technique within the broader category of plasma-surface interactions that specifically involves the use of reactive low-temperature plasma to selectively remove thin film material from a substrate through chemical and/or physical mechanisms at the atomic or molecular level.

4.5K

Publications

173.2K

Citations

12.2K

Authors

1.7K

Institutions

Publications per year

2017–2026

576

Parents

Publications

4.5K

Layered Double Hydroxide Nanosheets with Multiple Vacancies Obtained by Dry Exfoliation as Highly Efficient Oxygen Evolution Electrocatalysts

Yanyong Wang, Yiqiong Zhang, Zhijuan Liu et al. · Angewandte Chemie International Edition · 2017 · 992 citations

, , +17

A structure zone diagram including plasma-based deposition and ion etching

André Anders · Thin Solid Films · 2009 · 909 citations

, , +16

Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

J. W. Coburn, Min Chen · Journal of Applied Physics · 1980 · 880 citations

, , +16

Plasma etching: Yesterday, today, and tomorrow

Vincent M. Donnelly, A. Kornblit · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 846 citations

, , +17

“White Graphenes”: Boron Nitride Nanoribbons via Boron Nitride Nanotube Unwrapping

Haibo Zeng, Chunyi Zhi, Zhuhua Zhang et al. · Nano Letters · 2010 · 771 citations

, , +17

1–5 of 4.5K

Authors

12.2K

  1. SJ
    S. J. Pearton

    University of Florida, United States

    142 publications · 5.4K citations

    39

    h-index

  2. GS
    G. S. Oehrlein

    University of Maryland, College Park, United States

    101 publications · 5.3K citations

    39

    h-index

  3. MJ
    Mark J. Kushner

    University of Illinois Urbana-Champaign, United States

    64 publications · 3.9K citations

    38

    h-index

  4. VM
    Vincent M. Donnelly

    University of Houston, United States

    51 publications · 3.7K citations

    30

    h-index

  5. HH
    Herbert H. Sawin

    Massachusetts Institute of Technology, United States

    45 publications · 2.4K citations

    29

    h-index

1–5 of 12.2K

Institutions

1.7K

  1. Centre National de la Recherche Scientifique

    Paris, France

    46 h-index

    747 publications

    25.6K citations

  2. IBM (United States)

    Armonk, United States

    40 h-index

    194 publications

    15.9K citations

  3. University of Illinois Urbana-Champaign

    Urbana, United States

    37 h-index

    230 publications

    11.9K citations

  4. University of California, Berkeley

    Berkeley, United States

    37 h-index

    200 publications

    10.2K citations

  5. Massachusetts Institute of Technology

    Cambridge, United States

    36 h-index

    203 publications

    11.8K citations

  6. University of Florida

    Gainesville, United States

    36 h-index

    482 publications

    16.9K citations

  7. Lam Research (United States)

    Fremont, United States

    36 h-index

    176 publications

    15.4K citations

  8. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    35 h-index

    249 publications

    10.4K citations

1–8 of 1.7K

Venues

  1. 68

    h-index

  2. Journal of Applied Physics

    266 publications · 14.5K citations

    64

    h-index

  3. Applied Physics Letters

    270 publications · 12.9K citations

    60

    h-index

  4. 50

    h-index

  5. Japanese Journal of Applied Physics

    JJAP · 338 publications · 9.7K citations

    45

    h-index

1–5