A structure zone diagram including plasma-based deposition and ion etching

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

Natural Sciences, Materials Science, Physics +15

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

Natural Sciences, Materials Science, Physics +7

Revised structure zone model for thin film physical structure

R. Messier, Anupam Giri, R. Roy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 945 citations

Natural Sciences, Materials Science, Physics +12

Fundamental structure forming phenomena of polycrystalline films and the structure zone models

P.B. Barna, M. Adamik · Thin Solid Films · 1998 · 728 citations

Natural Sciences, Materials Engineering, Materials Science +16