Plasma Deposition

Plasma Deposition is a thin-film fabrication technique within plasma surface treatment that involves the formation of solid material on a substrate through the chemical reaction or physical condensation of plasma-generated species, distinguishing it from competing surface modification processes by its additive, layer-by-layer growth mechanism.

3.2K

Publications

116.5K

Citations

10K

Authors

1.9K

Institutions

Publications per year

2017–2026

429

Parents

Low-temperature PlasmasPlasma Surface TreatmentPlasma-surface Interactions

Publications

3.2K

Plasma-material interactions in current tokamaks and their implications for next step fusion reactors

G. Federici, C.H. Skinner, J.N. Brooks et al. · Nuclear Fusion · 2001 · 1.3K citations · Full text

Natural Sciences, Nuclear Engineering, Physics +17

A structure zone diagram including plasma-based deposition and ion etching

André Anders · Thin Solid Films · 2009 · 909 citations

Natural Sciences, Materials Engineering, Materials Science +16

Understanding plasma spraying

P. Fauchais · Journal of Physics D Applied Physics · 2004 · 750 citations

Natural Sciences, Physics, Microfabrication +16

Thin-film deposition: principles and practice

Choice Reviews Online · 1996 · 714 citations

Natural Sciences, Materials Engineering, Materials Science +17

Review of inductively coupled plasmas for plasma processing

Jeffrey Hopwood · Plasma Sources Science and Technology · 1992 · 678 citations

Natural Sciences, Electrical Engineering, Physics +17

1–5 of 3.2K

Authors

10K

MC
M. C. M. van de Sanden
Eindhoven University of Technology, Netherlands
34 publications · 1.3K citations
23
h-index
PF
Pietro Favia
University of Bari Aldo Moro, Italy
25 publications · 1.2K citations
21
h-index
RD
Riccardo d’Agostino
University of Bari Aldo Moro, Italy
22 publications · 1.2K citations
18
h-index
RD
Robert D. Short
University of South Australia, Australia
19 publications · 1K citations
18
h-index
WM
W. M. M. Kessels
Eindhoven University of Technology, Netherlands
23 publications · 1.4K citations
18
h-index

1–5 of 10K

Institutions

1.9K

1–8 of 1.9K

Venues

Surface and Coatings Technology
342 publications · 11.4K citations
52
h-index
Thin Solid Films
255 publications · 9.1K citations
46
h-index
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
146 publications · 6.1K citations
43
h-index
Journal of Applied Physics
121 publications · 5.7K citations
39
h-index
Applied Physics Letters
96 publications · 5K citations
38
h-index

1–5