Concepedia

Jeffrey Hopwood

JH

80

Publications

4.9K

Citations

36

H-Index

1988

Active since

Affiliations

Tufts University(Current)

Northeastern University

Physical Sciences (United States)

Michigan State University

IBM Research - Thomas J. Watson Research Center

Jeffrey Hopwood is an author at Tufts University specializing in engineering, electrical engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringPhysicsPlasma PhysicsMicroelectronicsMicrofabricationPlasma ScienceInstrumentationPulse Power

Publications per year

1988–2023

80

Publications

80

Review of inductively coupled plasmas for plasma processing

Jeffrey Hopwood · Plasma Sources Science and Technology · 1992 · 666 citations

Electrical Engineering, Engineering, Physics +11

Metal ion deposition from ionized mangetron sputtering discharge

S. M. Rossnagel, Jeffrey Hopwood · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 306 citations

Metal Atoms, Electrical Engineering, Engineering +14

Langmuir probe measurements of a radio frequency induction plasma

Jeffrey Hopwood, C. R. Guarnieri, S. J. Whitehair et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 294 citations

Engineering, Plasma Science, Plasma Physics +17

Magnetron sputter deposition with high levels of metal ionization

S. M. Rossnagel, Jeffrey Hopwood · Applied Physics Letters · 1993 · 262 citations

Engineering, Plasma Science, Plasma Physics +19

Electromagnetic fields in a radio-frequency induction plasma

Jeffrey Hopwood, C. R. Guarnieri, S. J. Whitehair et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 170 citations

Electrical Engineering, Rf Electric Field, Space Plasma Physics +14

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