Concepedia

S. M. Rossnagel

SM

Statistics

Publications

79

Citations

6K

H-Index

44

Active since

1981

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

IBM Research - Almaden

University at Albany, State University of New York

University of Illinois Urbana-Champaign

S. M. Rossnagel is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceThin FilmsPhysicsMicroelectronicsElectrical EngineeringMaterials EngineeringMagnetism

Publications per year

1981–2020

79

Publications

79

Alteration of Cu conductivity in the size effect regime

S. M. Rossnagel, T. S. Kuan · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 448 citations

Engineering, Thin Film Process Technology, Thermal Conductivity +20

Metal ion deposition from ionized mangetron sputtering discharge

S. M. Rossnagel, Jeffrey Hopwood · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 306 citations

Metal Atoms, Electrical Engineering, Engineering +14

Ionic Field Effect Transistors with Sub-10 nm Multiple Nanopores

Sung‐Wook Nam, M. J. Rooks, Ki‐Bum Kim et al. · Nano Letters · 2009 · 295 citations

Gas density reduction effects in magnetrons

S. M. Rossnagel · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 272 citations

Engineering, Plasma Science, Plasma Physics +19

Magnetron sputter deposition with high levels of metal ionization

S. M. Rossnagel, Jeffrey Hopwood · Applied Physics Letters · 1993 · 262 citations

Engineering, Plasma Science, Plasma Physics +19

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