Journal of Vacuum Science and Technology

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Journal of vacuum science & technology

5.5K

Publications

119.7K

Citations

650

Concepts

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Journal of Vacuum Science and Technology is a journal.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	125	2.4K	106.5K
2	Natural Sciences	77	511	21.6K
3	Health Sciences	23	35	1.2K
4	Education	22	59	1.5K
5	Medicine	16	26	1.2K

Journal of Vacuum Science and Technology

5.5K

Publications

119.7K

Citations

Showing yearly statistics from 2000-2026.

Page 1

	Year	Citations
Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings John A. Thornton Journal of Vacuum Science and Technology EngineeringApparatus GeometryDeposition ConditionsChemical DepositionArgon Pressure	1974	2.3K
New and unified model for Schottky barrier and III–V insulator interface states formation W. E. Spicer, P. W. Chye, Perry Skeath, Journal of Vacuum Science and Technology EngineeringCleavage SurfaceFermi-level PinningSemiconductor NanostructuresSemiconductors	1979	927
Auger and photoelectron line energy relationships in aluminum–oxygen and silicon–oxygen compounds C. D. Wagner, D. E. Passoja, H. F. Hillery, Journal of Vacuum Science and Technology EngineeringAtomic Emission SpectroscopyOxidation ResistanceOptoelectronic DevicesAluminum–oxygen Compounds	1982	823
Defects associated with the accommodation of misfit between crystals J. W. Matthews Journal of Vacuum Science and Technology EngineeringThin Film Process TechnologyDislocation SourcesPartial DislocationsQuantum Materials	1975	694
Unified defect model and beyond W. E. Spicer, I. Lindau, Perry Skeath, Journal of Vacuum Science and Technology Software MaintenanceEngineeringUnified Defect ModelSoftware EngineeringDefect Tolerance	1980	644
Refractory silicides for integrated circuits S. P. Murarka Journal of Vacuum Science and Technology Silicide ResistivityEngineeringRefractory SilicidesIntegrated CircuitsSilicon On Insulator	1980	601
Plasma etching—A discussion of mechanisms J. W. Coburn, Harold F. Winters Journal of Vacuum Science and Technology Plasma SituationsSelective EtchingEngineeringGlow DischargePlasma Physics	1979	593
Molecular Beam Investigation of Adsorption Kinetics on Bulk Metal Targets: Nitrogen on Tungsten David A. King, Michael G. Wells Journal of Vacuum Science and Technology Materials ScienceMolecular Beam InvestigationEngineeringSurface ChemistryNanotechnology	1972	565
Solution and Diffusion of Hydrogen in Tungsten Regula Frauenfelder Journal of Vacuum Science and Technology Materials ScienceChemical EngineeringEngineeringSemiquantitative AnalysisHydrogen Transition	1969	541
Proximity effect in electron-beam lithography T. H. P. Chang Journal of Vacuum Science and Technology Proximity EffectEngineeringElectron-beam LithographyPhysicsMicroscopy	1975	529

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