Concepedia
Statistics
Publications
1.2K
Citations
62.4K
Authors
168
Location
Fremont, United States
Lam Research (United States) is a company institution in Fremont, United States known for natural sciences, materials science, and materials engineering.
Top concepts
Materials ScienceNatural SciencesMaterials EngineeringEngineeringSemiconductor DevicesElectronic MaterialsEtching ProcessesSurface ScienceElectrical EngineeringPlasma Etching
The Evolution of Silicon Wafer Cleaning Technology
Werner Kern · Journal of The Electrochemical Society · 1990 · 1.7K citations
Engineering, Electrical Engineering, Materials Science +17
Optimal Policies for a Multi-Echelon Inventory Problem
A. J. Clark, Herbert E. Scarf · Management Science · 2004 · 1.3K citations
Management, Industrial Engineering, Operations Management +12
A. J. Clark, Herbert E. Scarf · Management Science · 1960 · 1.3K citations
Overview of atomic layer etching in the semiconductor industry
Keren J. Kanarik, Thorsten Lill, Eric A. Hudson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 604 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +15
A Method for Predicting the Performance of Unstable Miscible Displacement in Heterogeneous Media
E.J. Koval · Society of Petroleum Engineers Journal · 1963 · 509 citations · Full text
Engineering, Petroleum Engineering, Reservoir Characterization +12
1–5 of 1.2K
Lam Research (United States), United States
136 publications · 7.4K citations
42
h-index
137 publications · 4.8K citations
27
42 publications · 3.1K citations
26
111 publications · 2.1K citations
23
33 publications · 667 citations
14
1–5 of 168