Concepedia
Statistics
Publications
37
Citations
4.6K
H-Index
27
Active since
1991
Affiliations
Lam Research (United States)(Current)
University of California, Berkeley
Lawrence Livermore National Laboratory
University of California, Santa Barbara
University of Mohaghegh Ardabili
Vahid Vahedi is an author at Lam Research (United States) specializing in engineering, applied physics, and physics.
Top concepts
EngineeringApplied PhysicsPhysicsElectrical EngineeringSurface SciencePlasma SimulationMaterial ScienceMicroelectronicsPlasma PhysicsPlasma Science
Publications per year
1991–2023
A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges
Vahid Vahedi, M. Surendra · Computer Physics Communications · 1995 · 1K citations · Full text
Engineering, Physics, Natural Sciences +10
Overview of atomic layer etching in the semiconductor industry
Keren J. Kanarik, Thorsten Lill, Eric A. Hudson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 576 citations · Full text
Engineering, Layer Deposition, Integrated Circuits +17
Simultaneous Potential and Circuit Solution for 1D Bounded Plasma Particle Simulation Codes
John Verboncoeur, M. V. Alves, Vahid Vahedi et al. · Journal of Computational Physics · 1993 · 451 citations
Electrical Engineering, Engineering, Physics +8
Ion energy distributions in rf sheaths; review, analysis and simulation
Emi Kawamura, Vahid Vahedi, M. A. Lieberman et al. · Plasma Sources Science and Technology · 1999 · 364 citations
Engineering, Radio Frequency, Glow Discharge +16
Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. I. Analysis of numerical techniques
Vahid Vahedi, G. DiPeso, C.K. Birdsall et al. · Plasma Sources Science and Technology · 1993 · 200 citations
Processing Plasmas, Engineering, Glow Discharge +19
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