Concepedia

M. A. Lieberman

MA

Statistics

Publications

269

Citations

17.2K

H-Index

72

Active since

1969

Affiliations

University of California, Berkeley(Current)

Duke Medical Center

Duke University

École Polytechnique

Duke University Hospital

M. A. Lieberman is an author at University of California, Berkeley specializing in natural sciences, plasma physics, and physics.

ORCID

Publications per year

1969–2023

269

Publications

269

Global model of Ar, O2, Cl2, and Ar/O2 high-density plasma discharges

Chae-Jin Lee, M. A. Lieberman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 550 citations

, , +17

Analytical solution for capacitive RF sheath

M. A. Lieberman · IEEE Transactions on Plasma Science · 1988 · 548 citations

, , +14

Ion energy distributions in rf sheaths; review, analysis and simulation

Emi Kawamura, Vahid Vahedi, M. A. Lieberman et al. · Plasma Sources Science and Technology · 1999 · 371 citations

, , +17

Standing wave and skin effects in large-area, high-frequency capacitive discharges

M. A. Lieberman, Jean‐Paul Booth, Pascal Chabert et al. · Plasma Sources Science and Technology · 2002 · 359 citations

, , +17

Model of plasma immersion ion implantation

M. A. Lieberman · Journal of Applied Physics · 1989 · 292 citations

, , +7

1–5 of 269