Pascal Chabert

Physics of Radio-Frequency Plasmas

Pascal Chabert, Nicholas Braithwaite · Cambridge University Press eBooks · 2011 · 618 citations

Engineering, Plasma Science, Plasma Physics +19

Standing wave and skin effects in large-area, high-frequency capacitive discharges

M. A. Lieberman, Jean‐Paul Booth, Pascal Chabert et al. · Plasma Sources Science and Technology · 2002 · 357 citations

Electrical Engineering, Plasma Processing Uniformity, Engineering +15

Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation

M. M. Turner, Pascal Chabert · Physical Review Letters · 2006 · 173 citations

Electrical Engineering, Collisionless Electron Heating, Net Heating +14

CF x radical production and loss in a CF4 reactive ion etching plasma: Fluorine rich conditions

Jean‐Paul Booth, G. Cunge, Pascal Chabert et al. · Journal of Applied Physics · 1999 · 159 citations

Engineering, Pure Cf4, Glow Discharge +16

Ion flux nonuniformities in large-area high-frequency capacitive discharges

A. Perret, Pascal Chabert, Jean‐Paul Booth et al. · Applied Physics Letters · 2003 · 147 citations

Engineering, Glow Discharge, Plasma Science +18