Physics of Radio-Frequency Plasmas

TLDR

Low‑temperature radio‑frequency plasmas are essential in advanced technologies such as micro‑engineering, spacecraft propulsion, and efficient lighting, and they sit at the complex interface of physics, chemistry, and engineering. The book focuses mainly on physics and is intended for graduate students and researchers in applied physics and electrical engineering. It presents a cutting‑edge perspective on RF plasmas, covers basic plasma physics—including transport in bounded plasmas and electrical diagnostics—and provides worked examples and over 100 in‑text questions that apply theories to realistic scenarios. The pedagogic style engages readers, enabling them to develop physical arguments and mathematical analyses, while the examples and questions build confidence in applying these concepts to laboratory situations.

Abstract

Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.