Jean‐Paul Booth

Standing wave and skin effects in large-area, high-frequency capacitive discharges

M. A. Lieberman, Jean‐Paul Booth, Pascal Chabert et al. · Plasma Sources Science and Technology · 2002 · 357 citations

Electrical Engineering, Plasma Processing Uniformity, Engineering +15

CF 2 production and loss mechanisms in fluorocarbon discharges: Fluorine-poor conditions and polymerization

G. Cunge, Jean‐Paul Booth · Journal of Applied Physics · 1999 · 186 citations

Materials Science, Chemical Engineering, Engineering +14

Oxygen and fluorine atom kinetics in electron cyclotron resonance plasmas by time-resolved actinometry

Jean‐Paul Booth, N. Sadeghi · Journal of Applied Physics · 1991 · 173 citations

Fluorine Atom Kinetics, Engineering, Plasma Physics +19

CF x radical production and loss in a CF4 reactive ion etching plasma: Fluorine rich conditions

Jean‐Paul Booth, G. Cunge, Pascal Chabert et al. · Journal of Applied Physics · 1999 · 159 citations

Engineering, Pure Cf4, Glow Discharge +16

A novel electrostatic probe method for ion flux measurements

Nicholas Braithwaite, Jean‐Paul Booth, Gilles Cunge · Plasma Sources Science and Technology · 1996 · 155 citations

Electrical Engineering, Large-area Planar Probe, Ion Flux Measurements +10