Concepedia

Jean‐Paul Booth

JB

124

Publications

6.1K

Citations

45

H-Index

1950

Active since

Affiliations

École Polytechnique(Current)

Laboratoire de Physique des Plasmas

Centre National de la Recherche Scientifique

Sorbonne Université

Université Joseph Fourier

Jean‐Paul Booth is an author at École Polytechnique specializing in engineering, physics, and natural sciences.

Top concepts

EngineeringPhysicsApplied PhysicsNatural SciencesSpectroscopyChemistryElectrical EngineeringPlasma PhysicsAtomic PhysicsPlasma Science

Publications per year

1950–2023

124

Publications

124

Standing wave and skin effects in large-area, high-frequency capacitive discharges

M. A. Lieberman, Jean‐Paul Booth, Pascal Chabert et al. · Plasma Sources Science and Technology · 2002 · 357 citations

Electrical Engineering, Plasma Processing Uniformity, Engineering +15

CF 2 production and loss mechanisms in fluorocarbon discharges: Fluorine-poor conditions and polymerization

G. Cunge, Jean‐Paul Booth · Journal of Applied Physics · 1999 · 186 citations

Materials Science, Chemical Engineering, Engineering +14

Oxygen and fluorine atom kinetics in electron cyclotron resonance plasmas by time-resolved actinometry

Jean‐Paul Booth, N. Sadeghi · Journal of Applied Physics · 1991 · 173 citations

Fluorine Atom Kinetics, Engineering, Plasma Physics +19

CF x radical production and loss in a CF4 reactive ion etching plasma: Fluorine rich conditions

Jean‐Paul Booth, G. Cunge, Pascal Chabert et al. · Journal of Applied Physics · 1999 · 159 citations

Engineering, Pure Cf4, Glow Discharge +16

A novel electrostatic probe method for ion flux measurements

Nicholas Braithwaite, Jean‐Paul Booth, Gilles Cunge · Plasma Sources Science and Technology · 1996 · 155 citations

Electrical Engineering, Large-area Planar Probe, Ion Flux Measurements +10

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