Jean‐Paul Booth

Standing wave and skin effects in large-area, high-frequency capacitive discharges

M. A. Lieberman, Jean‐Paul Booth, Pascal Chabert et al. · Plasma Sources Science and Technology · 2002 · 359 citations

Natural Sciences, Electrical Engineering, Physics +17

CF 2 production and loss mechanisms in fluorocarbon discharges: Fluorine-poor conditions and polymerization

G. Cunge, Jean‐Paul Booth · Journal of Applied Physics · 1999 · 187 citations

Natural Sciences, Chemistry, Materials Science +16

Oxygen and fluorine atom kinetics in electron cyclotron resonance plasmas by time-resolved actinometry

Jean‐Paul Booth, N. Sadeghi · Journal of Applied Physics · 1991 · 174 citations

Natural Sciences, Physics, Chemical Kinetics +14

CF x radical production and loss in a CF4 reactive ion etching plasma: Fluorine rich conditions

Jean‐Paul Booth, G. Cunge, Pascal Chabert et al. · Journal of Applied Physics · 1999 · 161 citations

Natural Sciences, Materials Science, Physics +15

A novel electrostatic probe method for ion flux measurements

Nicholas Braithwaite, Jean‐Paul Booth, Gilles Cunge · Plasma Sources Science and Technology · 1996 · 155 citations

Natural Sciences, Electrical Engineering, Physics +12