Concepedia

Gilles Cunge

GC

22

Publications

1K

Citations

17

H-Index

1996

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Université Grenoble Alpes

Laboratoire d'Électronique des Technologies de l'Information

CEA Grenoble

Gilles Cunge is an author at Centre National de la Recherche Scientifique specializing in engineering, applied physics, and electrical engineering.

ORCID

Top concepts

Publications per year

1996–2021

22

Publications

22

A novel electrostatic probe method for ion flux measurements

Nicholas Braithwaite, Jean‐Paul Booth, Gilles Cunge · Plasma Sources Science and Technology · 1996 · 155 citations

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Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis

Gilles Cunge, B. Crowley, D. Vender et al. · Plasma Sources Science and Technology · 1999 · 130 citations

, , +17

Absolute OH density measurements by broadband UV absorption in diffuse atmospheric-pressure He–H<sub>2</sub>O RF glow discharges

Peter Bruggeman, Gilles Cunge, Nader Sadeghi · Plasma Sources Science and Technology · 2012 · 115 citations

Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing

Camille Petit‐Etienne, Maxime Darnon, Laurent Vallier et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 73 citations · Full text

, , +17

Plasma–wall interactions during silicon etching processes in high-density HBr/Cl<sub>2</sub>/O<sub>2</sub>plasmas

Gilles Cunge, M. Kogelschatz, O. Joubert et al. · Plasma Sources Science and Technology · 2005 · 52 citations

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