Concepedia

D. Vender

DV

Statistics

Publications

32

Citations

2.2K

H-Index

26

Active since

1987

Affiliations

Dublin City University(Current)

Australian National University

Eindhoven University of Technology

IBM Research - Thomas J. Watson Research Center

University of California, Berkeley

D. Vender is an author at Dublin City University specializing in engineering, physics, and applied physics.

Top concepts

EngineeringPhysicsApplied PhysicsPlasma PhysicsElectrical EngineeringPlasma SciencePlasma SimulationPlasma TheoryAtomic PhysicsPlasma Confinement

Publications per year

1987–2007

32

Publications

32

The application of the helicon source to plasma processing

Andrew Perry, D. Vender, Rod Boswell · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 244 citations

High Density, Plasma Electronics, Engineering +15

Numerical modeling of low-pressure RF plasmas

D. Vender, Rod Boswell · IEEE Transactions on Plasma Science · 1990 · 219 citations

Engineering, Plasma Science, Plasma Physics +16

Fluorocarbon high-density plasmas. I. Fluorocarbon film deposition and etching using CF4 and CHF3

G. S. Oehrlein, Y. Zhang, D. Vender et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 186 citations

Engineering, Plasma Physics, Chemistry +18

Negative ions in a radio-frequency oxygen plasma

E. Stoffels, W. W. Stoffels, D. Vender et al. · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 1995 · 171 citations

Electrical Engineering, Dominant Ion, Engineering +12

Fluorocarbon high-density plasmas. II. Silicon dioxide and silicon etching using CF4 and CHF3

G. S. Oehrlein, Y. Zhang, D. Vender et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 150 citations

Materials Science, Fluorocarbon Deposition, Electrical Engineering +15

Rows per page

1–5 of 32