Concepedia

D. Vender

DV

Statistics

Publications

32

Citations

2.2K

H-Index

26

Active since

1987

Affiliations

Dublin City University(Current)

Australian National University

Eindhoven University of Technology

IBM Research - Thomas J. Watson Research Center

University of California, Berkeley

D. Vender is an author at Dublin City University specializing in natural sciences, plasma physics, and physics.

ORCID

Publications per year

1987–2007

32

Publications

32

The application of the helicon source to plasma processing

Andrew Perry, D. Vender, Rod Boswell · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 245 citations

, , +16

Numerical modeling of low-pressure RF plasmas

D. Vender, Rod Boswell · IEEE Transactions on Plasma Science · 1990 · 219 citations

, , +17

Fluorocarbon high-density plasmas. I. Fluorocarbon film deposition and etching using CF4 and CHF3

G. S. Oehrlein, Y. Zhang, D. Vender et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 189 citations

, , +14

Negative ions in a radio-frequency oxygen plasma

E. Stoffels, W. W. Stoffels, D. Vender et al. · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 1995 · 171 citations

, , +12

Fluorocarbon high-density plasmas. II. Silicon dioxide and silicon etching using CF4 and CHF3

G. S. Oehrlein, Y. Zhang, D. Vender et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 152 citations

, , +17

1–5 of 32